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Tohoku University Institute of Fluid Science - Intelligent Nano-Process Lab
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Tohoku University Institute of Fluid Science - Intelligent Nano-Process LabTohoku University Institute of Fluid Science - Intelligent Nano-Process Lab


They execute ways to generate charged particles (positive and negative ions, electrons) and neutral particles (atoms/molecules).
The main aim of this research group is “Intelligent Nano-Processes” by combination of digital processes (atomic layer processes) and simulations of surface chemical reactions. They would like to realize “Intelligent Nano-Processes” through the fusion of experiments and computer simulation. Moreover, they combine bio-technology with their nano-technology to develop new functional devices, such as quantum dot solar cell, quantum dot laser, spike neuron device, etc..
They use New Quantum Effect Devices by the Fusion of the Biotechnology and Damage-Free Neutral-Beam Technology and Plasma Damage Prediction by Combining On-Wafer Monitoring and Modeling.
They use New Quantum Effect Devices by the Fusion of the Biotechnology and Damage-Free Neutral-Beam Technology and Plasma Damage Prediction by Combining On-Wafer Monitoring and Modeling.
Business Type: Nanotextile » | Biotechnology » | Electrotechnics » |
Tohoku University Institute of Fluid Science - Intelligent Nano-Process Lab2-1-1 Katahira, Aoba-ku |
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