ICFO-The Institute of Photonic Sciences

The NanoFabrication Lab (NFL) at ICFO is a transversal facility devoted to the fabrication and characterization of nanostructured photonic devices. This laboratory, which is open to users both within and outside ICFO, includes state of the art nanofabrication tools and techniques for a wide range of optical applications, ranging from biosensing to optical communications, and spanning a broad range of materials, including polymers, semiconductors, metals, or crystals, among others. The laboratory also includes tools for advanced material and device characterization. Available Techniques Lithography: electron-beam and optical lithography Etching: ICP, RIE and wet etching Thin film deposition: thermal and electron-beam evaporation, sputtering, atomic layer deposition Surface preparation: plasma asher, UVO cleaner, ovens Characterization: SEM, EDX, atomic force microscopy, spectroscopic ellipsometry, profilometry, microscopy, etc. Specific controlled environment: glove boxes, fume hoods, laminar flows, etc. Collaborations The NFL is open to external collaborations with industry, research centers and Universities. In particular, the NFL has a formal collaboration agreement with the CRnE of the Universitat Politècnica de Catalunya. We are active hosts to Pan-European Research Infrastructures.