Oxford Instruments Plasma Technology

About Company

Oxford Instruments Plasma Technology provides a range of high performance, flexible tools to semiconductor processing customers involved in research and development, and production. We specialise in three main areas:

• Etch
  • RIE, ICP, DRIE, RIE/PE, Ion Beam
• Deposition
  • PECVD, ICP CVD, Nanofab, ALD, PVD, IBD
• Growth
  • HVPE, Nanofab

Technologies:

• Plasma Etch and Deposition
• Atomic Layer Deposition(ALD)
• Ion Beam Etch and Deposition
• Nanoscale Growth Systems
• Hydride Vapour Phase Epitaxy

Markets:

• Display and Lighting
• Semiconductor Electronics
• Energy
• Information & Communication Technology
• Niche and Emerging Markets