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Oxford Instruments Plasma Technology

About Company

Oxford Instruments Plasma Technology provides a range of high performance, flexible tools to semiconductor processing customers involved in research and development, and production. We specialise in three main areas:

  • Etch
    • RIE, ICP, DRIE, RIE/PE, Ion Beam
  • Deposition
    • PECVD, ICP CVD, Nanofab, ALD, PVD, IBD
  • Growth
    • HVPE, Nanofab

Technologies:

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Business Type: Nanotextile » | Biotechnology » | Electrotechnics » |

Oxford Instruments Plasma Technology

Related Profiles

  • Oxford Instruments plc


  • Phone: +44 (0) 1934 837000
    plasmainfo@oxinst.com


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